Toshiba Toshiba Schneider Inverter Corporation

Chip cutters [Semiconductor manufacturing equipment]

 Merits of inverter drives

Chip cutters with inverters have the following merits:

- SEMI F47 compliance
  VFAS1 and VFPS1 comply with SEMI F47.

- Variable speed control
  Inverters can control high speed motors that are like spindles.

- 500Hz operation with standard inverters
  The standard VF-S15 and VF-AS1 design allow for 500Hz operation.
  (120x500Hz/2poles = 30000min-1)

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